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Vertical Vacuum Furnace

Description
Vertical vacuum furnace is a vacuum chamber furnace with 8" diameter × 7" height vertical quartz liner and stainless steel vacuum flange. It is designed for calcining or sintering ceramic material or annealing semiconductor wafer under vacuum or various gas atmosphere up to 1200°C.

Features
1. High quality Ni-Cr-Al resistance wire as heating element. Max. temperature can reach 1200°C,
2. High purity quartz liner: 8"(O.D.) × 7.5"(I.D) × 8"(Height) (200×190×200mm),
3. Effective heated chamber: 7.5"(Dia) × 8.0"(H), (5.6 Liter),
4. Stainless steel vacuum flange with two ball valves and vacuum gauge is included for immediate use,
5. Power control with 30 segments programmable
6. All accessories are included for immediate use:
(1) One piece of refractory disk which shall be put into the top of inside quartz liner to protect stainless steel from heat damage.
(2) One high temperature gloves using can be used < 90

parameters

Inside chamber Size
Dia240 × 220mm
Max. Working Temperature
1200°C
Standard working temperature
1100°C
Temperature Control
30 segments programmable and PID auto control
Quartz Tube Size
205 mm (O.D) × 190 mm( I.D) × 340 mm Height
Vacuum Flange
Stainless steel with double hi-temperature silicone O-rings ( <300°C)
Ball valve and vacuum gauge is installed for immediate use
Vacuum pressure up to 10Pa by mechanical pump
One porous ceramic disk is included. Must put the refractory disk in front flange to avoid flange over-heated
Heating rate
0 to 20 °C / min
Temperature accuracy
± 2°C
Heating Element
High quality Fe-Cr-Al-Mo spiral wire
Working Voltage
AC 220V/50HZ
Max. Power
9.5kW
Net Weight
180kg

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